Semiconductor accelerometer suitable for mass prodn. - has film element preventing extensive vibration of wt. at low cost and with high reliability

摘要

A semiconductor accelerometer contains a substrate (101) with a supporting element (11) and a wt. (103) formed in the substrate with a gap (124) between the wt. and the supporting element. The wt. is joined to the substrate by a freely protruding carrier (102) formed in the substrate. A voltage sensor is formed in a surface region formed by the carrier and wt. A film element (301) covering the wt. prevents its movement during excessive acceleration of the sensor. ADVANTAGE - Can be mass-produced using reliable, low-cost mechanism preventing excessive vibration of wt.