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发明名称
VERFAHREN ZUR PHOTOSELEKTIVEN METALLISIERUNG.
摘要
申请公布号
DE3770896(D1)
申请公布日期
1991.07.25
申请号
DE19873770896
申请日期
1987.08.31
申请人
GENERAL ELECTRIC CO., SCHENECTADY, N.Y., US
发明人
COLE, JR., HERBERT STANLEY;LIU, YUNG SHENG;SITNIK, THERESA ANN, SCOTIA NEW YORK 12302, US;LEVINSON, LIONEL MONTY, SCHENECTADY NEW YORK 12309, US
分类号
H01L21/3205;C23C18/14;C23C18/16;H05K3/00;H05K3/18;(IPC1-7):C23C18/16
主分类号
H01L21/3205
代理机构
代理人
主权项
地址
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