The scanning tunneling microscope has a tip holder with a tip, and a piezoelectric drive mechanism which drives the tip to which the tip holder is detachably mounted. A replacement rod replaces the tip holder. The replacement rod is mounted so as to be moving along the Z-axis of a coordinate system. The Z-axis extends through the tip holder and across the surface of the sample during observation. The sample is moved away from the Z-axis during the replacement. A sample stage has a sample holder mounted upon it. A replacement rod has a chuck for gripping the sample holder or the tip holder. The replacement rod is moutned so as to be moving along the Z-axis of a coordinate system. The Z-axis extends through the sample holder and across the surface of the sample during observation.
申请公布号
DE4041259(A1)
申请公布日期
1991.07.25
申请号
DE19904041259
申请日期
1990.12.21
申请人
TEXTILMASCHINENFABRIK DR. ERNST FEHRER AG, LEONDING, AT