| 摘要 |
PURPOSE:To improve productivity and a characteristic by fixing a composite piezoelectric panel onto the conductive panel of a flexible substrate by a conductive adhesive agent, forming plural bar-shaped composite panels by cutting the composite piezoelectric panel, conductive panel and common line in a (y) direction and providing a common electrode on the surface of the bar-shaped compound panel. CONSTITUTION:A plate-shaped piezoelectric panel to be formed as PZT is fixed onto a base 4 and cut in the (x) direction of (x) and (y) coordinates and a bar-shaped diaphragm 10 is formed. A coupling material such as high polymer resin 3, etc., is charged between the bar-shaped diaphragms 10 and the outer periphery and a compound piezoelectric panel 11 is formed. Next, the composite piezoelectric panel 11 is fixed onto the surface of a conductive panel 12 by using a conductive adhesive agent 13. Afterwards, for the compound piezoelectric panel 11 and the conductive panel 12, a slit 9 is provided so as to reach a backing material 6 from the surface of the compound piezoelectric panel 11, and plural bar-shaped composite panels 16 are formed in the (y) direction. Electrodes 5 of the respective piezoelectric pieces are commonly connected in the (y) direction on the surface. Therefore, it is not necessary to previously match positions for each conductive path 5 of the flexible substrate 7 and the electrode of the bar-shaped composite panel 16, and the cutting process can be reduced. |
