| 摘要 |
PURPOSE:To simplify the assembly work by forming comb-teeth form projection pieces to an insulating crystalline base, forming contacts on them, and installing them to a housing. CONSTITUTION:At the former halves of 100 bases on insulating crystalline bases 5, such as single crystal Si bases, for example, a protective membrane is attached, and by applying an anisotropic etching, plural parallel slits with a specific form determined by the crystallizing property of the Si can be formed. The etching speed to the side surfaces of these slits is delayed, and the side surfaces of the slits are made 111. Comb-teeth form projection pieces 7 are formed projecting forward between the heighboring slits respectively. A conductive material is attached to the upper surfaces and the side surfaces of the projection pieces 7 to form contacts 9. The latter halves of the bases 5 are, together with the ends of wiring plates 10, housed and kept in a housing 11, and the projection pieces 7 are projected from the front end of the housing 11. |
