VERFAHREN ZUR HERSTELLUNG EINES MESA-STREIFENS AUF EINER HALBLEITERSCHEIBEN-KRISTALLEBENE.

摘要

A method of fabricating a semiconductor crystal mesa stripe whose waist section is narrower than the upper plane of said mesa stripe. The method comprises the steps of forming a first striped mask on the semiconductor crystal wafer in order to fabricate a prescribed mesa stripe, linearly arranging a plurality of second striped masks, narrower than said first striped mask by the prescribed waist width of the main mesa stripe, on the semiconductor wafer plane at prescribed intervals and in parallel with said first striped mask in order to fabricate monitor mesa stripes; and of subjecting said semiconductor wafer plane to mesa etching.