发明名称 Gas ion laser - with long laser tube segment coated with resistive layer
摘要 In a gas ion laser with a capillary formed by an electrically conductive tube segment coated with an ion bombardment-resistant resistive layer, the novelty is that the tube segment length/internal radius ratio is greater than 5, and, in the plasma contacting region, the resistive layer has a mean surface resistivity (Pd) satisfying a mathematical relationship in which Pd is greater than or equal to the formula (I). In the formula VW (Z) (inV) = potential at tube wall VM (in V) = potential of tube segment VRO (in V) = potential at the cathode-side plasma edge in the tube segment region Z (in M) = cylinder coordinate in the tube axis direction w.r.t. the cathode-side end of the tube segment EZ (in V/M) = longitudinal field strength in the z-direction e (in A sec.) = elementary charge (1.602x19 power (-19) ipw (in S-1 m-2) = ionic current density M(in kg) = ionic mass (6.634x10 power (-26) for Ar) me (in kg) = electron mass (9.104x10-31) k(in J/K) =Boltzmann constant (1.381x10 power (-23) Te (in K) = electron temp. ADVANTAGE - Relatively long tube segment are used without significant energy loss via the laser tube.
申请公布号 DE4002004(A1) 申请公布日期 1991.07.25
申请号 DE19904002004 申请日期 1990.01.24
申请人 SIEMENS AG, 1000 BERLIN UND 8000 MUENCHEN, DE 发明人 BECKER-DE-MOS, BRUNO, DIPL.-ING.;SEELIG, WOLFGANG, PROF. DR., 6100 DARMSTADT, DE;SCHAEFER, KLAUS, DIPL.-ING., 6242 KRONBERG, DE
分类号 H01S3/032 主分类号 H01S3/032
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