PROCESS FOR THE PRODUCTION OF HARD CARBON LAYERS AND APPARATUS FOR CARRYING OUT THE PROCESS,申请号EP19900122260-传众专利搜索

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发明名称	PROCESS FOR THE PRODUCTION OF HARD CARBON LAYERS AND APPARATUS FOR CARRYING OUT THE PROCESS
摘要
申请公布号	EP0432528(A3)	申请公布日期	1991.07.24
申请号	EP19900122260	申请日期	1990.11.22
申请人	FRIED. KRUPP GESELLSCHAFT MIT BESCHRAENKTER HAFTUNG	发明人	BUCK, VOLKER, PROF. DR.;SCHLUMP, WOLFGANG, DR. RER. NAT.;WILLBRAND, JUERGEN, DIPL.-CHEM.
分类号	C30B29/04;C23C14/06;C23C14/32;(IPC1-7):C23C14/32;H01J37/32	主分类号	C30B29/04
代理机构		代理人
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