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发明名称
METHOD AND DEVICE FOR SPUTTERING
摘要
申请公布号
JPH03170665(A)
申请公布日期
1991.07.24
申请号
JP19890306426
申请日期
1989.11.28
申请人
ANELVA CORP
发明人
ISHIBASHI KEIJI
分类号
C30B25/06;C23C14/34;C23C14/35
主分类号
C30B25/06
代理机构
代理人
主权项
地址
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