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发明名称
METHOD AND APPARATUS FOR VAPOR DEPOSITION
摘要
申请公布号
JPH03170662(A)
申请公布日期
1991.07.24
申请号
JP19890309681
申请日期
1989.11.29
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
AKUTAGAWA RYUTARO;INOUE ISAMU;TAKEGAWA HIROZO;SHINTAKU HIDENOBU;KODAMA KAYOKO
分类号
C23C14/24
主分类号
C23C14/24
代理机构
代理人
主权项
地址
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