| 摘要 |
PURPOSE:To prevent an increase in the concentration of a developer by blowing high-humidity air into a chamber wherein development is carried out and keeping the steam pressure in the chamber to a saturated state, and then performing the development. CONSTITUTION:A high-humidity air blow-off opening 7 and a pump 8 are added to a conventional device. Air having high humidity is blown into a chamber 1 and thus the steam pressure is held in a saturated state to prevent the vaporing of the water in a developer, thereby stabilizing the concentration of the developer. Consequently, the developer having the stable concentration is blown, so while variance of pattern size is reduced, the drying of the developer remaining near a spray nozzle 3 is prevented, preventing the generation of pinholes. |
