发明名称 Semiconductor device having silicon-on-insulator structure and method of producing the same.
摘要 <p>A semiconductor device includes a first substrate (3) made of a semiconductor, a first insulator layer (2, 4, 7) which is formed on the first substrate, a second substrate (1) made of a semiconductor and formed on the first insulator layer, a trench (5) which extends from a top surface of the second substrate to at least a part of the first insulator layer, and a second insulator layer (12, 13) which substantially defines a side wall of the trench. &lt;IMAGE&gt;</p>
申请公布号 EP0437950(A2) 申请公布日期 1991.07.24
申请号 EP19900313725 申请日期 1990.12.17
申请人 FUJITSU LIMITED 发明人 MIURA, TAKAO;IMAOKA, KAZUNORI
分类号 H01L27/12;H01L21/76;H01L21/306;H01L21/762;H01L21/763 主分类号 H01L27/12
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