OPTICAL REDUCTION SYSTEM,申请号EP19890112975-传众专利搜索

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发明名称	OPTICAL REDUCTION SYSTEM
摘要
申请公布号	EP0350955(A3)	申请公布日期	1991.07.24
申请号	EP19890112975	申请日期	1989.07.14
申请人	THE PERKIN-ELMER CORPORATION	发明人	WILLIAMSON, DAVID M.
分类号	G02B17/08;G03F7/20;H01L21/027;H01L21/30;(IPC1-7):G02B17/08;G02B13/00	主分类号	G02B17/08
代理机构		代理人
主权项
地址

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