Apparatus for producing Czochralski-grown single crystals.

摘要

An apparatus for producing a single crystal grown by Czochralski method includes a winding drum (64) disposed in a case (24) for winding up and down a flexible pull wire (20), a power transmission mechanism (M2, 46 - 56) for driving the winding drum (64), and a bearing unit (60) for rotatably supporting the winding drum (64). The power transmission mechanism (M2, 46 - 56) and the bearing unit (60) are disposed outside the case (24) and isolated from the furnace atmosphere surrounding the winding drum (64) and the pull wire (20) in the case (24). With this construction, metallic dust produced by abrasion from the power transmission mechanism (M2, 46 - 56) and the bearing unit (60) has no influence on the condition of the furnace atmosphere and hence the quality of a single crystal being pulled upwardly by the pull wire (20).