| 摘要 |
PCT No. PCT/DE90/00966 Sec. 371 Date Sep. 1, 1992 Sec. 102(e) Date Sep. 1, 1992 PCT Filed Dec. 16, 1990 PCT Pub. No. WO91/10210 PCT Pub. Date Jul. 11, 1991.The invention is directed to a method and to an apparatus for the correction of the positioning errors of a light ray deflected across a surface by a deflection system comprising at least one mirror face, said light ray moving transversely vis-a-vis the line direction relative to the deflection system. The light ray is generated with a laser diode that is displaceable transversely relative to the direction of the emerging light ray dependent on correction values. Before the actual operation, a plurality of positioning errors of the light ray are measured for every mirror face of the deflection system in the line direction (X-positioning error) and perpendicularly thereto (Y-positioning errors), measurements are made at measuring points orientated in the line direction on the surface. At least one X-correction value and one Y-correction value is generated for every mirror face. The laser diode is displaced such dependent on the X-correction values and on the Y-correction values such that the light ray incident onto the surface experiences correction displacements in and perpendicularly vis-a-vis the line direction for the elimination of the X-positioning errors and of the Y-positioning errors. Given simultaneous checking of the positioning errors, the correction values are varied until the positioning errors are compensated. The correction values calculated in this way are stored and are output during actual operation for continuous error compensations synchronized with the motion of the deflection system. |
