| 摘要 |
PURPOSE:To highly purify NH3 gas containing impurities by the use of a small amount of fibrous activated charcoal. CONSTITUTION:Gas of NH3 usually having impurities of hydrocarbons such as hexane and benzene, sulfur-containing compounds such as methyl mercaptan and nitrogen-containing compounds such as trimethylamine is brought into contact with a fibrous activated charcoal to remove said impurities by adsorption. Specific surface area of said fibrous activated charcoal is, e.g. about 500-2500m<2>/g. Comparing the elimination effect by the adsorption of impurities in NH3 gas on a granular activated charcoal with a that on the fibrous activated charcoal having about same values of specific surface area and pore volume, the elimination efficiency of the fibrous activated charcoal is as 5 times much as that of granular activated charcoal. As a result, highly purified NH3 gas usable as a raw material for producing NH3-employing products such as NH4F, used for etching solution in producing electronic part materials such as semiconductor, is obtained.
|
