发明名称 Semiconductor device with reduced side wall parasitic device action
摘要 A semiconductor device having a sapphire substrate on which is formed a localized island of polysilicon, the island having side walls which extend away from a surface of the substrate. A field effect transistor is formed in the island and a doped polysilicon fillet is interposed between the gate region and the substrate. In addition the electrical potential of the polysilicon fillet is controlled with respect to the source region. The control of the electrical potential enables the premature turn on characteristics of the device to be reduced by the polysilicon fillet forming a secondary gate electrode on the side walls, and because these secondary gates are at source potential the parasitic edge transistor present in the side wall is always turned off. A modified device has an independent side gate bias arrangement.
申请公布号 US5034788(A) 申请公布日期 1991.07.23
申请号 US19900603465 申请日期 1990.10.25
申请人 MARCONI ELECTRONIC DEVICES LIMITED 发明人 KERR, JOHN A.
分类号 H01L29/78;H01L29/786 主分类号 H01L29/78
代理机构 代理人
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