| 摘要 |
PURPOSE:To obtain the vibration gyroscope capable of measuring an angular velocity with high accuracy without any temperature drift by fixing a Mach- Zehnder interferometer which has an arm formed of an optical waveguide to a vibration body, and forming the optical waveguide on the surface of the vibration body. CONSTITUTION:The Mach-Zehnder interferometer which has the arm formed of the optical waveguide is fixed to the beam (vibrating gyro beam) 1 and optical waveguides 6b and 6c are formed on the surface of the beam 1; when an angular speed OMEGA around the long axis of the beam 1 is inputted, strain generated in the beam 1 with a Corioli's force is detected as optical path difference variation between the optical waveguides 6b and 6c. In this constitution, the detection system from the strain of the beam 1 due to the Corioli's force includes neither an adhesive nor a piezoelectric thin film. Consequently, the temperature drift which is inevitable before is not generated as a result. Further, the Mach-Zehnder interferometer detects the optical path difference variation between both arms with high accuracy, so the angular speed can be measured with high accuracy. |
