| 摘要 |
PURPOSE:To suppress the temp. change of an object to be treated by a method wherein the AC power supplied to the heater of a hot plate is controlled on the basis of the detection result of the temp. detection means of the hot plate and the object to be treated and a temp. set value by the operation of operation quantity and the alteration of a control interval. CONSTITUTION:The temp. of a hot plate 10 uniformizing the temp. of an object to be treated in a predetermined value is detected by the first temp. detection means 20 and the temp. of the object to be treated is detected by the second temp. detection means 18. Further, in a control means 16, the AC power supplied to the heater 11 of the hot plate 10 is controlled on the basis of the detection results of the temp. detection means 20, 18 and a temp. set value by the operation of operation quantity and the alteration of a control interval. As a result, the noise generated by the control of power can be prevented and the temp. change of the object to be treated can be suppressed with high accuracy. |
