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发明名称
METHOD FOR CHANGING OPERATIONAL MODE OF ION IMPLANTER
摘要
申请公布号
JPH03167746(A)
申请公布日期
1991.07.19
申请号
JP19890304626
申请日期
1989.11.27
申请人
HITACHI LTD;HITACHI NAKA ELECTRON KK
发明人
ISOGAI SHIZUSHI;NISHIZAWA YUKIO;TAKAGI YOSHIMI
分类号
H01J37/317;H01L21/265
主分类号
H01J37/317
代理机构
代理人
主权项
地址
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