摘要 |
<p>PURPOSE:To stably operate a semiconductor element inside by a method wherein an external lead terminal is formed of a metal body in which copper sheets having a thickness substantially identical to a thickness of a sheetlike body composed of an invar alloy are bonded to the surface and the rear surface of the sheetlike body. CONSTITUTION:An insulating substrate 1 and a lid body 2 are composed of a forsterite sintered substance or a zirconia sintered substance. External lead terminals 5 are formed of a metal body in which copper sheets, having a thickness substantially identical to a thickness of a sheetlike body composed of an invar alloy, are bonded to the surface and the rear surface of the sheetlike body, whose magnetic permeability is about 133 (CGS), whose electric conductivity is 67.4% (ICAS) or higher and whose coefficient of thermal expansion is about 106X10<-7>/ deg.C. Thereby, even when an electric current flows to the external lead terminals 5, a large self-inductance is not generated in the external lead terminals 5. As a result, a noise by a counter electromotive force caused by the self-inductance can be reduced to a minimum and a semiconductor element inside can be operated stably.</p> |