FORMING METHOD OF THIN FILM,申请号JP19890308415-传众专利搜索

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发明名称	FORMING METHOD OF THIN FILM
摘要
申请公布号	JPH03166722(A)	申请公布日期	1991.07.18
申请号	JP19890308415	申请日期	1989.11.27
申请人	SEIKO INSTR INC	发明人	KAKIUCHI KOJI
分类号	H01L21/3205;H01L21/28;H01L21/285	主分类号	H01L21/3205
代理机构		代理人
主权项
地址

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