| 发明名称 |
A wafer centering assembly. |
| 摘要 |
<p>The wafer centering assembly includes a pair of pivot arms (35) which can be pivoted simultaneously to adjust to the diameter of a conveyed wafer. Each pivot arm (35) has a stop (34) which arrests the motion of a wafer such that the axis or the water is approximately centered on the axis of a vacuum head (31). <IMAGE></p> |
| 申请公布号 |
EP0437018(A2) |
申请公布日期 |
1991.07.17 |
| 申请号 |
EP19900309002 |
申请日期 |
1990.08.16 |
| 申请人 |
SILICON TECHNOLOGY CORPORATION |
发明人 |
STEERE, ROBERT E., III;LEONARD, THOMAS E. |
| 分类号 |
B23Q3/18;B24B9/00;B24B9/06;B24B41/06;H01L21/301;H01L21/304;H01L21/677;H01L21/68 |
主分类号 |
B23Q3/18 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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