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发明名称
ELECTRON GUN ARRANGEMENT FOR USE IN THE ELECTRON BEAM EVAPORATION PROCESS
摘要
申请公布号
EP0411482(A3)
申请公布日期
1991.07.17
申请号
EP19900114411
申请日期
1990.07.27
申请人
ANELVA CORPORATION
发明人
YAMAMOTO, HISASHI
分类号
C23C14/30;H01J37/147;H01J37/305;(IPC1-7):H01J37/305
主分类号
C23C14/30
代理机构
代理人
主权项
地址
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