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发明名称
CHARGED PARTICLE BEAM DEVICE
摘要
申请公布号
JPH03165438(A)
申请公布日期
1991.07.17
申请号
JP19890305943
申请日期
1989.11.24
申请人
NIPPON DENSHI TEKUNIKUSU KK
发明人
KIMOTO MASAHIKO
分类号
H01J37/22;H01J37/244;H01J37/28
主分类号
H01J37/22
代理机构
代理人
主权项
地址
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