| 摘要 |
PURPOSE:To enable an amorphous semiconductor film to be uniform in characteristics and improved in conversion efficiency and to make effective use of a photodetective region by a method wherein a photoelectric conversion region is formed on a circular insulating substrate, and a reactant gas is made to flow uniformly without standing so as to form a uniform amorphous semiconductor film at the formation of an amorphous semiconductor layer. CONSTITUTION:A transparent electrode film 2, an amorphous semiconductor layer 6 which includes an optical active layer, and a rear electrode 7 formed of aluminum or the like are successively laminated on a circular substrate 1 of insulating material such as transparent glass or the like to form photoelectric conversion regions 1a-1f. The photoelectric conversion regions 1a-1f which are formed by dividing the circular substrate 1 radially from its center into six sectors are equal in light receiving area. In the photoelectric conversion regions 1a-1f, the rear electrodes 7 and the transparent electrode films 2 of the adjacent regions are electrically connected together in series at a joining region 3 through the intermediary of a conductive member 9. A collector electrode 4 higher than the electrode film 2 in conductivity is interposed between the transparent electrode film 2 and the amorphous semiconductor layer 6 to effectively collect moving carriers. |
