| 摘要 |
PURPOSE:To always correct the angular error by the misalignment between a sample surface and the center of rotation of a goniometer and to analyze with high acuracy by providing a position detecting means which detects the misalignment between the sample surface and the center of rotation of th goniometer and a controller for the goniometer to which the output from this position detecting means is inputted. CONSTITUTION:The ultrasonic position sensor 9 is provided in the position where the X-ray passage in the direction perpendicular to the sample surface is not hindered. A displacement measuring part 10 is connected to this ultrasonic position sensor 9 and further, an angle error correcting part 11 is provided in this goniometer control part 8. The position of the sample 3 is detected by the ultrasonic position sensor 9 and the displacement quantity between the sample 3 and the center of rotation of th goniometer is measured by the displacement measuring part 10 from the detected value. The measured displacement quantity signal is inputted to the goniometer control part 8 and an theta axis and 2theta axis are so controlled by the angle error correcting part 11 as to attain the exact angle. |
