发明名称 PAD STRUCTURE OF SEMICONDUCTOR DEVICE
摘要 PURPOSE:To eliminate specific PAD exclusive for testing thereby enabling the chip size to be minimized by a method wherein a bumping metal is separated into multiple parts to be structured in multiple PADs which are melted down by heat treatment after inspection process to be unified into one PAD. CONSTITUTION:A PAD 10 is divided into two rectangles; signal wires are led into the inside of IC; one wire is used for testing the proper functions of IC while the other wire is used for testing PAD. When a heat treatment process called wet back process is performed after finishing the tests, the PADs 10 extend over a central Au/Cr 13 to unify the two PADs 10 completely separated so far. Accordingly, notable cost reduction can be realized by minimizing the chip size and cutting down the test time etc.
申请公布号 JPH03165532(A) 申请公布日期 1991.07.17
申请号 JP19890305221 申请日期 1989.11.25
申请人 SEIKO EPSON CORP 发明人 KOBAYASHI MASANORI
分类号 H01L21/66;H01L21/60 主分类号 H01L21/66
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