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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH03165026(A)
申请公布日期
1991.07.17
申请号
JP19890303359
申请日期
1989.11.24
申请人
OKI ELECTRIC IND CO LTD
发明人
YANAI TETSURO
分类号
H01L21/3205;H01L21/28
主分类号
H01L21/3205
代理机构
代理人
主权项
地址
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