| 摘要 |
PURPOSE:To make it possible to recognize whether a photoresist is removed or not while an ashing operation is being conducted by a method wherein ultraviolet rays are made to irradiate, and the fluorescence emitted from the photoresist is detected. CONSTITUTION:The surface layer of a photoresist is removed as an ashing operation makes progress in an ashing chamber 3, and the nonhardened photoresist layer on the lower layer is exposed. The light emitted from a mercury lamp 4 becomes the ultraviolet rays having the prescribed wavelength through an excitation filter 5, the molecule constituting the photoresist is excited by the ultraviolet rays, and the fluorescence of specific wavelength is emitted. The wavelength of this fluorescence is selected by a detection filter 7, the fluorescence is converted into an electric signal by a photoelectron multiplier tube 8, and it is outputted to a monitoring device. Consequently, as the point of time when the removal of the hardened photoresist can be specified, the photoresist can be removed while the damage on the device 1 is being prevented. |
