| 发明名称 |
SUPPORTING APPARATUS FOR SEMICONDUCTOR CRYSTAL ROD |
| 摘要 |
<p>A supporting apparatus (1) for a semiconductor monocrystal rod (15) comprises a movable ring (10) adapted to move freely in horizontal direction unless it is engaged with the monocrystal rod, a lock means to prevent the movable ring from horizontally moving, and a drive means to elevate the movable ring.</p> |
| 申请公布号 |
EP0288639(B1) |
申请公布日期 |
1991.07.17 |
| 申请号 |
EP19870308760 |
申请日期 |
1987.10.02 |
| 申请人 |
SHIN-ETSU HANDOTAI COMPANY, LIMITED |
发明人 |
IKEDA, YASUHIRO C/O SEMICONDUCTOR LABORATORY;MIZUISHI, KOUJI C/O ISOBE FACTORY |
| 分类号 |
C30B13/32;C30B13/28 |
主分类号 |
C30B13/32 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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