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发明名称
VAPOR GROWTH DEVICE FOR SEMICONDUCTOR SUBSTRATE
摘要
申请公布号
JPH03165512(A)
申请公布日期
1991.07.17
申请号
JP19890306094
申请日期
1989.11.24
申请人
NEC CORP
发明人
FUJIE KOJI
分类号
H01L21/205
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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