| 摘要 |
A cryocrucible permits the introduction of ion clusters of a cryogen, like oxygen or nitrogen, to a vacuum chamber, and preferably comprises a liquid cryogen containment vessel connected to an expansion chamber through a solenoid-actuated valve, a cooling means for maintaining the cryogen as a liquid in the containment vessel, and a nozzle connecting the expansion chamber to the vacuum chamber. Liquid evaporates through the valve into the expansion chamber and, then, forms clusters when it expands further while passing through the nozzle into the vacuum chamber.
|
