发明名称 |
Deposition of superconducting thick films by spray inductively coupled plasma method |
摘要 |
A method is provided to apply a coating of a superconducting ceramic oxide to a substrate comprising introducing an atomized aqueous solution comprising at least three metal salts into inductively coupled plasma so as to deposit a superconductive ceramic oxide on the substrate, or alternatively, to deposit a mixed metal oxide on the substrate, which is converted into a superconductive ceramic oxide by post-annealing.
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申请公布号 |
US5032568(A) |
申请公布日期 |
1991.07.16 |
申请号 |
US19890402066 |
申请日期 |
1989.09.01 |
申请人 |
REGENTS OF THE UNIVERSITY OF MINNESOTA |
发明人 |
LAU, YUK-CHIU;PFENDER, EMIL |
分类号 |
C23C16/40;C23C16/507;H01L39/24 |
主分类号 |
C23C16/40 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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