发明名称 Deposition of superconducting thick films by spray inductively coupled plasma method
摘要 A method is provided to apply a coating of a superconducting ceramic oxide to a substrate comprising introducing an atomized aqueous solution comprising at least three metal salts into inductively coupled plasma so as to deposit a superconductive ceramic oxide on the substrate, or alternatively, to deposit a mixed metal oxide on the substrate, which is converted into a superconductive ceramic oxide by post-annealing.
申请公布号 US5032568(A) 申请公布日期 1991.07.16
申请号 US19890402066 申请日期 1989.09.01
申请人 REGENTS OF THE UNIVERSITY OF MINNESOTA 发明人 LAU, YUK-CHIU;PFENDER, EMIL
分类号 C23C16/40;C23C16/507;H01L39/24 主分类号 C23C16/40
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