发明名称 Apparatus for polishing
摘要 Polishing agent including as a main constituent an aqueous solution containing sodium bromite. The aqueous solution may further contain particles which are not dissolved in the solution or an alkali agent to adjust the pH to 8 to 14. Also the apparatus and method for polishing articles using the polishing agent are disclosed.
申请公布号 US5032203(A) 申请公布日期 1991.07.16
申请号 US19890293211 申请日期 1989.01.04
申请人 NIPPON TELEGRAPH & TELEPHONE CORP.;NIPPON SILICA INDUSTRIAL CO., LTD. 发明人 DOY, TOSHIROH K.;NAKADA, HIROSHI;KUNIMITSU, YOSHIHIKO
分类号 H01L21/304;B24B1/00;B24B57/02;C09K3/14;H01L21/306 主分类号 H01L21/304
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