发明名称 |
Composite aluminum plate and target for physical coating processes produced therefrom and methods for producing same |
摘要 |
The present invention provides a composite aluminum plate suitable as a target for coating purposes, said plate comprising a surface layer melted on the basis of pure aluminum (Al>/=99.99), optionally consisting of a pure alloy, e.g., the members of which have a purity greater than or equal to 99.99%, melted on the basis of pure aluminum (Al>/=99.99); and (2) a supporting layer comprising a hardenable aluminum alloy having a Brinell hardness index HB of at least about 50 after being heat-treated under suitable conditions. This invention further provides a target suitable for physical or sputter coating processes, such as cathodic sputtering and magnetron sputtering. Methods for preparing such a plate and target are also provided.
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申请公布号 |
US5032468(A) |
申请公布日期 |
1991.07.16 |
申请号 |
US19890441866 |
申请日期 |
1989.11.27 |
申请人 |
VEREINIGTE ALUMINIUM WERKE |
发明人 |
DUMONT, CHRISTIAN M.;SCHMITZ, NORBERT W.;QUADERER, HANS |
分类号 |
B23K20/233;B32B15/01;C22F1/04;C23C14/34 |
主分类号 |
B23K20/233 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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