| 摘要 |
PURPOSE:To reduce the cost of the instrument, to prolong the life, and to make an efficient optical scan corresponding to an object to be measured by making the scan electrically by a pattern generating means with a light spot which is formed by turning on a spot light emitting element. CONSTITUTION:The light source 1 is constituted by arranging many spot light emitting elements and the pattern generating means 2 turns on and off those light emitting elements to scan the light emission part. A 1st image forming optical means 3 images the light emitted by the spot light emitting means on a measurement surface 4 to form the light spot P. An optical position detector 5 is composed of a PSD or has the same function with it to detect the light spot position on the light receiving surface of the optical position detector 5. A 2nd image forming optical means 6 images the light spot P, which is formed on the measurement surface 4, on the light receiving surface of the optical position detector 5. Then the light spot position on the light receiving surface of the optical position detector 5 corresponds to the height of the position of the light spot P on the measurement surface 4. Further, the optical position detector 5 detects the brightness of the light spot P and is used as a height and brightness measuring instrument. |
