PRODUCTION OF THIN FILM OF SILICON,申请号JP19890300693-传众专利搜索

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发明名称	PRODUCTION OF THIN FILM OF SILICON
摘要
申请公布号	JPH03162565(A)	申请公布日期	1991.07.12
申请号	JP19890300693	申请日期	1989.11.21
申请人	NKK CORP	发明人	MORIYAMA AYANORI;OMURA MASAKI;TOUCHI MASAKICHI;MIYASATO TATSURO
分类号	C01B33/00;C23C14/14	主分类号	C01B33/00
代理机构		代理人
主权项
地址

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