| 摘要 |
PURPOSE:To shorten remarkably the time for observation of trouble disgnosis by applying to the integrated circuit continuous electron beams for observing a picture and a test signal which stops and holds at one cycle at the desired position of an integrated circuit. CONSTITUTION:An electron beam tester composed of a test signal generator 16 applying a test signal to an integrated circuit chip under mutually different two sets of test parameters, an electron-beam EB prober 12 which observes the state of operation of the integrated circuit, a trouble-picture formation circuit 15 obtaining a differential picture between observed picture acquired under both test parameters, and the display unit 20 of the differential picture are provided. Continuous electron beam for observing the pictures and the test signal which stops and hold at one cycle at the desire location of the integrated circuit are applied to the integrated circuit 10. Accordingly, the test signal is held as it is at specified test pattern timing, and the pictures are observed by the electron beams of DCs, thus largely shortening the observed time of trouble diagnosis. |
