IONENSTRAHLGERAET SOWIE VERFAHREN ZUR DURCHFUEHRUNG VON POTENTIALMESSUNGEN MITTELS EINES IONENSTRAHLES,申请号DE19904000579-传众专利搜索

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发明名称	IONENSTRAHLGERAET SOWIE VERFAHREN ZUR DURCHFUEHRUNG VON POTENTIALMESSUNGEN MITTELS EINES IONENSTRAHLES
摘要
申请公布号	DE4000579(A1)	申请公布日期	1991.07.11
申请号	DE19904000579	申请日期	1990.01.10
申请人	ICT INTEGRATED CIRCUIT TESTING GESELLSCHAFT FUER HALBLEITERPRUEFTECHNIK MBH, 8011 HEIMSTETTEN, DE	发明人	FROSIEN, JUERGEN, DR.-ING., 8012 OTTOBRUNN, DE
分类号	G01Q60/44;G01R31/302;H01J37/244;H01J37/26;H01J37/28;H01L21/66	主分类号	G01Q60/44
代理机构		代理人
主权项
地址

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