| 摘要 |
<p>A sensor comprises a semiconductor pellet (10) having member (11) which receives the action of a force, a stationary member (13) fixed to the sensor body and a flexible portion (12) formed between the two members (11) and (13); a member (20) for transmitting the force to the member (11); and detection means (60-63) which convert the mechanical deformation of a distortion-producing member due to the transmitted force into an electric signal in order to detect the force acting on the member (20) as an electric signal. This sensor is combined with a signal processor, which comprises analog multipliers (101-109) and analog adder/substracters (111-113), and has a function for cancelling the interference in the different directions in which the forces are exerted. In the sensor are provided two portions (E3, E4-E8) that are located at opposing positions and that produce displacement between them due to the action of a force. The sensor is tested by applying the coulomb force between the two. Further, seats (21, 22) are provided to surround the action member (20). A predetermined gap is formed between the member (20) and the seats, and the displacement of the member (20) is limited within a predetermined range that corresponds to the gap. The member (20) and the seats are obtained by cutting the same common substrate (350, 350').</p> |
