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发明名称
INSPECTING METHOD OF OPENING OF CONTACT HOLE
摘要
申请公布号
JPH03161950(A)
申请公布日期
1991.07.11
申请号
JP19890300828
申请日期
1989.11.21
申请人
OKI ELECTRIC IND CO LTD
发明人
MIYAGAWA YASUHARU
分类号
H01L21/66
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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