| 摘要 |
<p>PURPOSE:To do the carriage and transfer of a jig body easily by equipping at least either of another pair of both side plates, which become parallel with stored wafers, with a handle. CONSTITUTION:This is equipped with side walls 2a and 2b, where plural V-shaped wafer storing grooves 3a and 3b corresponding each other are formed in the opposite faces, and other sidewalls 4a and 4b, which become parallel with stored wafers, and by these sidewalls a pocket 5 to store the wafers is formed. Hereupon, either of the sidewall parallel with the wafer insertion face of the body 1 is equipped with a handle 8 for carriage or transfer. Moreover, to prevent the dust occurrence by handling, a dust preventing plate 9 is provided in front of the handle 8, whereby the pollution by a wafer stored in a wafer storing jig 1 can be prevented. By such simple constitution, a wafer storing jig, with which handling or transfer work is easy, can be obtained.</p> |
