SCANNING ELECTRON MICROSCOPE.

摘要

A scanning tunneling microscope installed in a sample chamber of a scanning electron microscope includes a probe which is finely movable along the surface of a sample driven by a probe moving mechanism and within an area which is irradiated by an electron beam issuing from the electron microscope. An electron microscope image is attainable by causing the electron beam to scan the sample surface, and a tunneling microscope image by moving the probe. The probe moving mechanism is implemented with an X-, Y- and Z-direction piezoelectric element actuator assembly. A stage to be loaded with a sample is movable in the Z direction driven by an inchworm motion mechanism which uses piezoelectric element actuators.