发明名称 MOLDED ARTICLE FOR HOLDING WAFER.
摘要 <p>A molded article for holding a wafer, which is made of a thermoplastic resin reinforced with whiskers and used for handling a wafer and a glass sheet for a liquid crystal television set, such as a transfer basket, a storage case, a carrier jig, and the like. It is useful for washing, drying, moving or storing a semiconductor wafer free of contamination. <IMAGE></p>
申请公布号 EP0436030(A1) 申请公布日期 1991.07.10
申请号 EP19900910186 申请日期 1990.07.04
申请人 OTSUKA KAGAKU KABUSHIKI KAISHA 发明人 TABUCHI, AKIRA OTSUKA KAGAKU KABUSHIKI KAISHA;NAKAMURA, MORIHIKO OTSUKA KAGAKU KABUSHIKI KAISHA
分类号 B65D85/86;C08K7/08;C08K9/02;C08L23/10;H01L21/673;H01L21/68 主分类号 B65D85/86
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