发明名称 |
MOLDED ARTICLE FOR HOLDING WAFER. |
摘要 |
<p>A molded article for holding a wafer, which is made of a thermoplastic resin reinforced with whiskers and used for handling a wafer and a glass sheet for a liquid crystal television set, such as a transfer basket, a storage case, a carrier jig, and the like. It is useful for washing, drying, moving or storing a semiconductor wafer free of contamination. <IMAGE></p> |
申请公布号 |
EP0436030(A1) |
申请公布日期 |
1991.07.10 |
申请号 |
EP19900910186 |
申请日期 |
1990.07.04 |
申请人 |
OTSUKA KAGAKU KABUSHIKI KAISHA |
发明人 |
TABUCHI, AKIRA OTSUKA KAGAKU KABUSHIKI KAISHA;NAKAMURA, MORIHIKO OTSUKA KAGAKU KABUSHIKI KAISHA |
分类号 |
B65D85/86;C08K7/08;C08K9/02;C08L23/10;H01L21/673;H01L21/68 |
主分类号 |
B65D85/86 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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