| 摘要 |
The coating method is performed by gas plasma processing. The oxide material of powder or rod shape obtained by a common method is supplied between plasma electrodes in a pair and accelerated to the metal cap by plasma gas containing one or more of nitrogen, hydrogen, hellium, and alcohol gas, and deposited on metal cap. The deposited thickness of oxide layer is controlled by moving the metal cap with a relative velocity to the pendulum motion of plasma electrode.
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