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发明名称
SEMICONDUCTOR INTEGRATED CIRCUIT APPARATUS
摘要
申请公布号
JPH03160378(A)
申请公布日期
1991.07.10
申请号
JP19890300334
申请日期
1989.11.17
申请人
FUJITSU LTD
发明人
OZEKI MASANORI
分类号
G01R31/28;H01L21/66;H01L21/82
主分类号
G01R31/28
代理机构
代理人
主权项
地址
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