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经营范围
发明名称
SCANNING ELECTRON MICROSCOPE
摘要
申请公布号
JPH03156849(A)
申请公布日期
1991.07.04
申请号
JP19890294810
申请日期
1989.11.15
申请人
HITACHI LTD
发明人
SHIMIZU MINORU
分类号
H01J37/24;G01B15/00;H01J37/16;H01J37/20;H01J37/28
主分类号
H01J37/24
代理机构
代理人
主权项
地址
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