| 摘要 |
<p>PURPOSE:To detect voltage with high sensitivity by interposing a medium having a dielectric constant higher than that of air between a part to be measured and the detection part arranged close to said part. CONSTITUTION:When a detection part is composed of an optical probe 10, the size thereof is pref. almost same as that of the electrode 22 of an object 20 to be measured. A total reflection mirror 16 is formed on the bottom surface of the probe 10 and a high dielectric constant medium 34 is interposed between the probe 10 and the object 20 to be measured. When the medium 34 is composed of gas or a liquid, the liquid medium is supplied to the space between the probe 10 and the object 20 to be measured from a liquid medium supply apparatus 10A wherein the probe 10 is mounted on a support structure at each time of measurement. As mentioned above, by interposing the medium 34 having a dielectric constant larger than that of air between the optical probe (detection part) 10 and the object 20 to be measured and reducing the difference between the dielectric constant of the probe 10 and that of the gap between the probe 10 and the circuit 20, it can be prevented that an equipotential line avoids the probe 10 and, therefore, the electric field generated in the probe 10 can be intensified.</p> |
