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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH03156939(A)
申请公布日期
1991.07.04
申请号
JP19890296423
申请日期
1989.11.15
申请人
FUJITSU LTD
发明人
HARADA SHIGEKI;MATSUKI HIROHISA;UENO SEIJI
分类号
H01L23/12;H01L21/60
主分类号
H01L23/12
代理机构
代理人
主权项
地址
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